A Proposal of DEVS Model for Simulation Based Acquisition in FAB Process of Semiconductor Manufacturing

An advanced equipment process is an important technological assets to companies. Development of the IT industry has led to an increase in demand for the semiconductor productivity of the high efficiency, steadily. But it is not easy to test using actual process because TAT (as known turnaround time of job) is so long. the test cost is also expensive. This paper proposes a DEVS model for simulation based acquisition in FAB process of semiconductor manufacturing. This model shows FAB process based on DEVS formalism. it will be enable us to reduce the cost of FAB process testing.